Huang, Xingjie https://orcid.org/0000-0003-2466-0997
Xing, Yanhui
Yu, Guohao
Tang, Wenxin
Wei, Xing
Song, Liang
Zhang, Xiaodong
Fan, Yaming
Zeng, Zhongming
Cai, Yong
Zhang, Baoshun
Huang, Zengli
Huang, Rong
Funding for this research was provided by:
Youth Innovation Promotion Association of the Chinese Academy of Sciences (2020321)
National Natural Science Foundation of China (92163204)
Beijing Natural Science Foundation Project (4202010)
Natural Science Foundation Key Project of Jiangxi Province, China (20202ACBL202001)
Key Laboratory Construction Project of Nanchang (2020-NCZDSY-008)
Jiangxi Province Double Thousand Plan under (S2019CQKJ2638)
Article Title: The effect of SiN x film for H plasma implantation in p-GaN/AlGaN/GaN high electron mobility transistors
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-05-01
Date Accepted: 2022-06-19
Online publication date: 2022-06-29