Hiwasa, Noboru
Kataoka, Junji
Sasao, Norikatsu
Kuboi, Shuichi
Iino, Daiki
Kurihara, Kazuaki
Fukumizu, Hiroyuki
Article Title: Analysis of formation mechanism of deposited film in a high-aspect-ratio hole during dry etching using fluorocarbon gas plasmas
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-08-09
Date Accepted: 2022-08-25
Online publication date: 2022-09-09