Kagawa, Gakuto
Sugimoto, Takumi
Takahashi, Hidetoshi
Funding for this research was provided by:
Mitutoyo Association for Science and Technology
Article Title: Liquid-immersion inclined UV lithography using cube prism and mirrors
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-07-05
Date Accepted: 2022-10-04
Online publication date: 2022-10-17