Matsubara, Eri
Hasegawa, Ryota
Nishibayashi, Toma
Yabutani, Ayumu
Yamada, Ryoya
Imoto, Yoshinori
Kondo, Ryosuke
Iwayama, Sho
Takeuchi, Tetsuya
Kamiyama, Satoshi
Shojiki, Kanako https://orcid.org/0000-0003-0781-7016
Kumagai, Shinya
Miyake, Hideto
Iwaya, Motoaki https://orcid.org/0000-0002-4889-706X
Funding for this research was provided by:
Ministry of Education, Culture, Sports, Science and Technology (Private University Research Branding Project)
New Energy and Industrial Technology Development Organization (Feasibility Study Program)
Japan Science and Technology Agency (A-step Project (JPMJTR201D))
Japan Society for the Promotion of Science (KAKENHI (22H00304))
Ministry of the Environment (MOE program for the implementation of innovative infection-control)
Core Research for Evolutional Science and Technology (JPMJCR16N2)
Article Title: A method for exfoliating AlGaN films from sapphire substrates using heated and pressurized water
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-10-02
Date Accepted: 2022-10-05
Online publication date: 2022-10-18