Harada, Shunta https://orcid.org/0000-0002-3076-6678
Sakane, Hitoshi
Mii, Toshiki
Kato, Masashi https://orcid.org/0000-0002-2921-709X
Funding for this research was provided by:
New Energy and Industrial Technology Development Organization (JPNP20004)
Article Title: Suppression of partial dislocation glide motion during contraction of stacking faults in SiC epitaxial layers by hydrogen ion implantation
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics
Publication dates
Date Received: 2023-01-08
Date Accepted: 2023-01-22
Online publication date: 2023-02-02