Sugihara, Atsushi https://orcid.org/0000-0001-6501-9499
Ichinose, Tomohiro https://orcid.org/0000-0002-8158-1606
Tamaru, Shingo https://orcid.org/0000-0001-7105-4805
Yamamoto, Tatsuya https://orcid.org/0000-0002-1640-1947
Konoto, Makoto https://orcid.org/0000-0001-5851-3595
Nozaki, Takayuki https://orcid.org/0000-0002-9678-8319
Yuasa, Shinji https://orcid.org/0000-0003-1093-9057
Funding for this research was provided by:
New Energy and Industrial Technology Development Organization (JPNP20017)
Article Title: Low magnetic damping in an ultrathin CoFeB layer deposited on a 300 mm diameter wafer at cryogenic temperature
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2023 The Japan Society of Applied Physics
Publication dates
Date Received: 2023-01-12
Date Accepted: 2023-02-08
Online publication date: 2023-02-23