Nishibata, Itsuki https://orcid.org/0000-0001-8605-8657
Sano, Tomokazu https://orcid.org/0000-0003-2624-5092
Funding for this research was provided by:
Japan Society for the Promotion of Science (22J10847)
Ministry of Education, Culture, Sports, Science and Technology (JPMXS0118068348)
Article Title: Nonlinear propagation calculation-based irradiation process control for several mJ ultrashort pulse laser processing
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-07-28
Date Accepted: 2023-09-27
Online publication date: 2023-10-12