Tanisawa, Daiki
Takizawa, Tetsuya
Yamaguchi, Asato
Murotani, Hiroshi
Takashiri, Masayuki https://orcid.org/0000-0001-7041-6595
Funding for this research was provided by:
Japan Society for the Promotion of Science (22H04953)
Article Title: Origin of ultralow thermal conductivity in amorphous Si thin films investigated using nanoindentation, 3ω method, and phonon transport analysis
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-10-18
Date Accepted: 2023-11-09
Online publication date: 2023-12-26