Kobayashi, Atsushi https://orcid.org/0000-0001-5795-6490
Honda, Yoshio
Maeda, Takuya https://orcid.org/0000-0002-2736-5611
Okuda, Tomoya
Ueno, Kohei https://orcid.org/0000-0002-7888-995X
Fujioka, Hiroshi
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP21H01827)
Izumi Science and Technology Foundation
Article Title: Structural characterization of epitaxial ScAlN films grown on GaN by low-temperature sputtering
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-11-27
Date Accepted: 2023-12-03
Online publication date: 2023-12-29