Chen, Guo
Zhang, Zilong
Gu, Keyun
Sang, Liwen
Koizumi, Satoshi
Toda, Masaya
Ye, Haitao
Koide, Yasuo
Huang, Zhaohui
Liao, Meiyong https://orcid.org/0000-0003-1361-4266
Funding for this research was provided by:
Japan Society for the Promotion of Science (20H02212)
Article Title: Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-12-26
Date Accepted: 2024-01-18
Online publication date: 2024-02-02