Yamada, Shinji
Shirai, Masanori
Kobayashi, Hiroki
Arai, Manabu
Kachi, Tetsu
Suda, Jun
Funding for this research was provided by:
Ministry of Education, Culture, Sports, Science and Technology (JPJ009777)
Article Title: Realization of low specific-contact-resistance on N-polar GaN surfaces using heavily-Ge-doped n-type GaN films deposited by low-temperature reactive sputtering technique
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-12-25
Date Accepted: 2024-02-07
Online publication date: 2024-03-04