Kobayashi, Takuma https://orcid.org/0000-0002-2755-5079
Fujimoto, Hiroki https://orcid.org/0000-0002-8443-6279
Kamihata, Shinji
Hachiken, Keiji
Hara, Masahiro https://orcid.org/0000-0001-9748-8011
Watanabe, Heiji https://orcid.org/0000-0002-7916-3093
Funding for this research was provided by:
Ministry of Education, Culture, Sports, Science and Technology (JPJ009777)
Japan Society for the Promotion of Science (24H00046)
Japan Science and Technology Agency (JPMJAN24E5)
Article Title: Performance and reliability improvements in SiC(0001) MOS devices via two-step annealing in H2/Ar gas mixtures
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2025-06-26
Date Accepted: 2025-07-31
Online publication date: 2025-08-26