Watanabe, Takanobu https://orcid.org/0000-0002-9421-8195
Article Title: Kinetics of thermal oxidation of silicon
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2025-09-18
Date Accepted: 2025-11-12
Online publication date: 2025-12-08