Wang, Yuning
Nagasaka, Kumi
Mitarai, Takuya
Ohiso, Yoshitaka
Amemiya, Tomohiro
Nishiyama, Nobuhiko
Funding for this research was provided by:
New Energy and Industrial Technology Development Organization
Japan Science and Technology Agency (JPMJAC1603, JPMJCR15N16)
Japan Society for the Promotion of Science (#16H06082, #17H03247)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: High-quality InP/SOI heterogeneous material integration by room temperature surface-activated bonding for hybrid photonic devices
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-01-18
Date accepted: 2020-03-26
Online publication date: 2020-04-23