Kouge, Kouichiro
Tomita, Kentaro
Hotta, Junya
Pan, Yiming
Tomuro, Hiroaki
Morita, Masayuki
Yanagida, Tatsuya
Uchino, Kiichiro
Yamamoto, Naoji
Article Title: Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography light sources
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-02-11
Date Accepted: 2021-04-21
Online publication date: 2021-05-14