Enomoto, Satoshi
Yoshino, Takumi
Machida, Kohei
Kozawa, Takahiro
Article Title: Effects of an organotin compound on radiation-induced reactions of extreme-ultraviolet resists utilizing polarity change and radical crosslinking
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2018 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-09-11
Date Accepted: 2018-10-17
Online publication date: 2018-11-19