Okumura, Hironori
Funding for this research was provided by:
Japan Society for the Promotion of Science (16H06424; 17H14110)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Fabrication of an AlN ridge structure using inductively coupled Cl2/BCl3 plasma and a TMAH solution
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-10-31
Date accepted: 2018-12-11
Online publication date: 2019-01-25