Fukunaga, Yusuke
Tsutsumi, Takayoshi
Kondo, Hiroki
Ishikawa, Kenji https://orcid.org/0000-0002-8288-6620
Sekine, Makoto
Hori, Masaru
Article Title: Narrow free-standing features fabricated by top-down self-limited trimming of organic materials using precisely temperature-controlled plasma etching system
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-11-30
Date Accepted: 2018-12-18
Online publication date: 2019-01-21