Mizuno, Tomohisa
Kanazawa, Rikito
Aoki, Takashi
Sameshima, Toshiyuki
Funding for this research was provided by:
Japan Society for the Promotion of Science (17K06359)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: SiC nanodot formation in amorphous-Si and poly-Si substrates using a hot-C+-ion implantation technique
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-09-28
Date accepted: 2018-12-25
Online publication date: 2019-02-18