Migita, Shinji https://orcid.org/0000-0002-5936-9182
Ota, Hiroyuki
Shibuya, Keisuke
Yamada, Hiroyuki
Sawa, Akihito
Matsukawa, Takashi
Toriumi, Akira
Funding for this research was provided by:
Japan Science and Technology Agency (CREST)
Article Title: Phase transformation behavior of ultrathin Hf 0.5 Zr 0.5 O 2 films investigated through wide range annealing experiments
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-10-08
Date Accepted: 2019-01-18
Online publication date: 2019-03-05