Murugesan, M.
Takeuchi, A.
Fukushima, T.
Koyanagi, M.
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: X-ray computed tomography studies on directed self-assembly formed vertical nanocylinders containing metals for 3D LSI applications—characterization technique-dependent reliability issues
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-10-01
Date accepted: 2019-01-11
Online publication date: 2019-03-27