Fujimoto, Yuta
Uenuma, Mutsunori https://orcid.org/0000-0002-3387-6805
Nakamura, Tsubasa
Furukawa, Masaaki
Ishikawa, Yasuaki
Uraoka, Yukiharu
Journal title: Japanese Journal of Applied Physics
Article type: lett
Article title: Physical and electrical properties of ALD-Al2O3/GaN MOS capacitor annealed with high pressure water vapor
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2019-01-21
Date accepted: 2019-02-22
Online publication date: 2019-03-27