Fujimoto, Yuta
Uenuma, Mutsunori https://orcid.org/0000-0002-3387-6805
Nakamura, Tsubasa
Furukawa, Masaaki
Ishikawa, Yasuaki
Uraoka, Yukiharu
Article Title: Physical and electrical properties of ALD-Al 2 O 3 /GaN MOS capacitor annealed with high pressure water vapor
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-01-21
Date Accepted: 2019-02-22
Online publication date: 2019-03-27