Shu, Yunyi
Hirai, Yoshikazu
Tsuchiya, Toshiyuki
Tabata, Osamu
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-11-30
Date accepted: 2019-02-06
Online publication date: 2019-05-21