Liu, Qiang
Fujimoto, Naoki
Nitta, Shugo
Honda, Yoshio
Amano, Hiroshi
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Computational fluid dynamics simulation study of the gas flow balance in a vertical HVPE reactor with a showerhead for low cost bulk GaN crystal growth
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-12-30
Date accepted: 2019-03-15
Online publication date: 2019-05-28