Doi, Atsushi
Nakajima, Mizuki
Masuda, Sho
Satoh, Nobuo
Yamamoto, Hidekazu
Article Title: Cross-sectional observation in nanoscale for Si power MOSFET by atomic force microscopy/Kelvin probe force microscopy/scanning capacitance force microscopy
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-12-24
Date Accepted: 2019-02-25
Online publication date: 2019-06-13