Toyoda, Noriaki
Uematsu, Kota
Article Title: Atomic layer etching by gas cluster ion beams with acetylacetone
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-11-12
Date Accepted: 2019-03-27
Online publication date: 2019-05-30