Qin, Huiquan
Xiao, Xia
Sui, Xiaole
Qi, Haiyang
Funding for this research was provided by:
National Natural Science Foundation of China (61571319)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Influence of residual stress on the determination of Young’s modulus for SiO 2 thin film by the surface acoustic waves
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-11-14
Date accepted: 2019-04-01
Online publication date: 2019-06-26