Yatabe, Zenji https://orcid.org/0000-0003-2069-6677
Nishiyama, Koshi
Tsuda, Takaaki
Nishimura, Kazuki
Nakamura, Yusui
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP19K04473)
Journal title: Japanese Journal of Applied Physics
Article type: lett
Article title: Synthesis and characterization of mist chemical vapor deposited aluminum titanium oxide films
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2019-04-24
Date accepted: 2019-06-13
Online publication date: 2019-06-28