Schroeder, Uwe https://orcid.org/0000-0002-6824-2386
Materano, Monica
Mittmann, Terence
Lomenzo, Patrick D.
Mikolajick, Thomas
Toriumi, Akira
Journal title: Japanese Journal of Applied Physics
Article type: rev
Article title: Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2019-08-22
Date accepted: 2019-09-18
Online publication date: 2019-10-04