Yuli, Wen
Ohdaira, Keisuke
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Thickness dependence of the passivation quality of Cat-CVD SiN x films
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2019-06-28
Date accepted: 2019-10-03
Online publication date: 2019-12-04