Ohno, Yutaka https://orcid.org/0000-0003-3998-4409
Yoshida, Hideto
Kamiuchi, Naoto https://orcid.org/0000-0002-4145-5226
Aso, Ryotaro https://orcid.org/0000-0002-1599-2300
Takeda, Seiji
Shimizu, Yasuo https://orcid.org/0000-0002-6844-8165
Nagai, Yasuyoshi
Liang, Jianbo https://orcid.org/0000-0001-5320-6377
Shigekawa, Naoteru https://orcid.org/0000-0001-7454-8640
Funding for this research was provided by:
JST/CREST (JPMJCR17J1(2017–2023))
Cooperative Research Program of “Network Joint Research Center for Materials and Devices: Dynamic Alliance for Open Innovation Bridging Human, Environment and Materials" (20183055)
Inter-University Cooperative Research Program in IMR (19M0404)
Article Title: Impact of focused ion beam on structural and compositional analysis of interfaces fabricated by surface activated bonding
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics
Publication dates
Date Received: 2019-06-12
Date Accepted: 2019-10-04
Online publication date: 2019-11-26