Mizuno, Tomohisa
Kanazawa, Rikito
Aoki, Takashi
Sameshima, Toshiyuki
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: SiC quantum dot formation in SiO2 layer using double hot-Si+/C+-ion implantation technique
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-09-27
Date accepted: 2019-11-26
Online publication date: 2020-02-06