Mizuno, Tomohisa
Kanazawa, Rikito
Aoki, Takashi
Sameshima, Toshiyuki
Article Title: SiC quantum dot formation in SiO 2 layer using double hot-Si + /C + -ion implantation technique
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-09-27
Date Accepted: 2019-11-26
Online publication date: 2020-02-06