Denpoh, Kazuki
Moroz, Paul
Kato, Taiki
Matsukuma, Masaaki
Article Title: Multiscale plasma and feature profile simulations of plasma-enhanced chemical vapor deposition and atomic layer deposition processes for titanium thin film fabrication
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-07-24
Date Accepted: 2019-11-26
Online publication date: 2020-02-26