Tanaka, Ryo https://orcid.org/0000-0002-4058-7649
Takashima, Shinya
Ueno, Katsunori
Matsuyama, Hideaki
Edo, Masaharu
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Demonstration of 1200 V/1.4 mΩ cm2 vertical GaN planar MOSFET fabricated by an all ion implantation process
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-09-30
Date accepted: 2019-12-18
Online publication date: 2020-01-27