Uesugi, Kenjiro
Hayashi, Yusuke
Shojiki, Kanako
Miyake, Hideto
Funding for this research was provided by:
Japan Society for the Promotion of Science (KAKENHI Grants JP16H06415)
Ministry of Education, Culture, Sports, Science and Technology (Program for Building Regional Innovation Ecosystem)
Strategic International Collaborative Research Program (EU H2020 No. 720527 (InRel-NPower))
Core Research for Evolutional Science and Technology (16815710)
Article Title: Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics
Publication dates
Date Received: 2019-03-16
Date Accepted: 2019-04-18
Online publication date: 2019-05-08