Hatmanto, Adhi Dwi
Kita, Koji
Funding for this research was provided by:
JSPS KAKENHI (18H03771)
Cross-ministerial Strategic Innovation Promotion Program
Journal title: Applied Physics Express
Article type: lett
Article title: Similarity and difference of the impact of ion implantation and thermal oxidation on the lattice structure of 4H-SiC (0001) surface
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2019-06-26
Date accepted: 2019-07-10
Online publication date: 2019-07-23