Wang, Xiaoni
Wang, Zhaoyong
Tian, Weimin
Han, Yanbing
Yao, Ning
Funding for this research was provided by:
Science and Technology Projects of Henan Province (12b14007, 152102210038, 172102210106)
Journal title: Applied Physics Express
Article type: lett
Article title: Optical properties of AlN films deposited by energy-filtering magnetron sputtering technique
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-12-02
Date accepted: 2019-12-26
Online publication date: 2020-01-09