Nagata, Kengo https://orcid.org/0000-0002-1281-0372
Makino, Hiroaki
Yamamoto, Taiji
Kataoka, Keita https://orcid.org/0000-0003-4855-4339
Narita, Tetsuo https://orcid.org/0000-0002-0849-360X
Saito, Yoshiki https://orcid.org/0000-0002-6914-3945
Journal title: Applied Physics Express
Article type: lett
Article title: Low resistivity of highly Si-doped n-type Al0.62Ga0.38N layer by suppressing self-compensation
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-11-12
Date accepted: 2019-12-27
Online publication date: 2020-01-28