Mizubayashi, Wataru
Noda, Shuichi
Ishikawa, Yuki
Nishi, Takashi
Kikuchi, Akio
Ota, Hiroyuki
Su, Ping-Hsun
Li, Yiming
Samukawa, Seiji
Endo, Kazuhiko
Article Title: Impacts of plasma-induced damage due to UV light irradiation during etching on Ge fin fabrication and device performance of Ge fin field-effect transistors
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2017 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-11-02
Date Accepted: 2016-12-12
Online publication date: 2017-01-11