Li, Xiongfeng
Liang, Yiyong
Zhan, Shichao
Xu, Jianfeng
Bai, Jian
Wang, Kaiwei
Journal title: Applied Physics Express
Article type: lett
Article title: Optical vortex beam direct-writing photolithography
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-01-11
Date accepted: 2018-01-24
Online publication date: 2018-02-15