Horikiri, Fumimasa https://orcid.org/0000-0001-6710-3045
Ohta, Hiroshi
Asai, Naomi
Narita, Yoshinobu
Yoshida, Takehiro
Mishima, Tomoyoshi
Journal title: Applied Physics Express
Article type: lett
Article title: Excellent potential of photo-electrochemical etching for fabricating high-aspect-ratio deep trenches in gallium nitride
Copyright information: © 2018 The Japan Society of Applied Physics
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Publication dates
Date received: 2018-07-05
Date accepted: 2018-07-27
Online publication date: 2018-08-10