Hosoi, Takuji
Katsu, Yoshihito
Moges, Kidist
Nagai, Daisuke
Sometani, Mitsuru
Tsuji, Hidenori
Shimura, Takayoshi
Watanabe, Heiji
Journal title: Applied Physics Express
Article type: lett
Article title: Passive–active oxidation boundary for thermal oxidation of 4H-SiC(0001) surface in O2/Ar gas mixture and its impact on SiO2/SiC interface quality
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-06-09
Date accepted: 2018-07-13
Online publication date: 2018-08-02