Moges, Kidist
Sometani, Mitsuru
Hosoi, Takuji
Shimura, Takayoshi
Harada, Shinsuke
Watanabe, Heiji
Journal title: Applied Physics Express
Article type: lett
Article title: Sub-nanometer-scale depth profiling of nitrogen atoms in SiO2/4H-SiC structures treated with NO annealing
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-07-31
Date accepted: 2018-08-16
Online publication date: 2018-09-03