Zhang, Sheng
Lu, Ziyu
Sheng, Jiang
Gao, Pingqi
Yang, Xi
Wu, Sudong
Ye, Jichun
Kambara, Makoto
Article Title: In situ annealing and high-rate silicon epitaxy on porous silicon by mesoplasma process
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-03-11
Date Accepted: 2016-03-28
Online publication date: 2016-04-14