Li, Hu
Karahashi, Kazuhiro
Fukasawa, Masanaga
Nagahata, Kazunori
Tatsumi, Tetsuya
Hamaguchi, Satoshi
Article Title: Mass-selected ion beam study on etching characteristics of ZnO by methane-based plasma
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-05-13
Date Accepted: 2015-09-28
Online publication date: 2016-01-08