Shimizu, Yasuo
Takamizawa, Hisashi
Inoue, Koji
Yano, Fumiko
Kudo, Shuichi
Nishida, Akio
Toyama, Takeshi
Nagai, Yasuyoshi
Article Title: Impact of carbon co-implantation on boron distribution and activation in silicon studied by atom probe tomography and spreading resistance measurements
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-07-06
Date Accepted: 2015-11-01
Online publication date: 2016-01-05