Takeyama, Mayumi B.
Noya, Atsushi
Article Title: Application of Al–Nb alloy film to metal capping layer on Cu
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-06-30
Date Accepted: 2015-11-11
Online publication date: 2016-01-25