Shiomi, Hiromu
Kitai, Hidenori
Tsujimura, Masatoshi
Kiuchi, Yuji
Nakata, Daisuke
Ono, Shuichi
Kojima, Kazutoshi
Fukuda, Kenji
Sakamoto, Kunihiro
Yamasaki, Kimiyohi
Okumura, Hajime
Article Title: Electrical and physical characterizations of the effects of oxynitridation and wet oxidation at the interface of SiO2/4H-SiC(0001) and
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-09-16
Date Accepted: 2016-01-20
Online publication date: 2016-03-29