Seto, Junichi
Ohdaira, Keisuke
Matsumura, Hideki
Article Title: Catalytic doping of phosphorus and boron atoms on hydrogenated amorphous silicon films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-09-30
Date Accepted: 2015-11-23
Online publication date: 2016-03-03