Fukuyama, Hiroyuki
Miyake, Hideto
Nishio, Gou
Suzuki, Shuhei
Hiramatsu, Kazumasa
Article Title: Impact of high-temperature annealing of AlN layer on sapphire and its thermodynamic principle
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-12-16
Date Accepted: 2015-12-28
Online publication date: 2016-04-07